1. We are a global trading company, we have a large stock of spare parts, we also produce energy storage batteries

2. Our main sales products are industrial automation control equipment accessories, such as: controller board, processor module, communication module, input and output module, power module (various circuit boards and cards), touch screen, servo driver, servo motor, sensor, cable......

3. We can not only provide new products, but also supply cold and discontinued spare parts, all the discontinued parts will go through strict testing to ensure the reliability of product performance, so that customers can buy and use at ease

4. For more information, please contact us: Contact: Amy | Email: saul01@qq.com | Tel(WhatsApp/Wechat): +86-15359298283

AMAT 0010-23716 Valve actuator Chinese details

1. Product Overview

AMAT 0010-23716 is a high precision valve actuator designed by Applied Materials, Inc., mainly used in semiconductor manufacturing equipment (such as CVD, PVD, etch machines, etc.) for precise control of process gas or vacuum system flow. Its core function is to ensure fast response, stability and long life in the harsh semiconductor process environment.

2. Technical features

High-precision control: stepper motor or piezoelectric drive technology, support micrometer flow regulation, adapt to the stringent requirements of semiconductor technology.

Fast response: millisecond opening and closing speed ensures high efficiency of process gas switching.

Corrosion resistant: gas contact parts are made of special materials (such as stainless steel, ceramic or nickel plated alloy), resistant to corrosive gas (such as Cl₂, SF₆, etc.).

Sealing: vacuum grade sealing design, very low leakage rate (usually < 1×10⁻⁹ Torr·L/s), to ensure the vacuum of the chamber.

Compatibility: Supports integration with AMAT device control systems (e.g. Producer® series) and remote control via standard communication protocols (RS-485, Ethernet).

3. Typical application scenarios

Thin film deposition (CVD/PVD) : Precise control of reaction gas flow into the deposition chamber.

Plasma etching: adjust the etching gas flow and chamber pressure.

Vacuum system management: used to control the isolation valve between the vacuum pump and the chamber.

4. Key parameters (reference values, please refer to the official manual)

Description of parameters

Drive mode electric/piezoelectric drive

The operating voltage is 24VDC ±10%

Control signal analog signal (0-10V) or digital pulse

Repetition accuracy ±0.1% full scale

The operating temperature ranges from -20°C to +80°C

Protection grade IP67 (dustproof and waterproof)

AMAT 0010-23716 valve actuator

AMAT 0010-23716 valve actuator

AMAT 0010-23716 valve actuator

AMAT 0010-23716 valve actuator

AMAT 0010-23716 valve actuator

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